Radiation-sensitive polyimide precursor composition derived from

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making

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430281, 430283, 430916, 430919, 20415916, 20415918, 20415919, G03C 168

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044304188

ABSTRACT:
A radiation-sensitive polyimide precursor composition, comprising a polymer of the formula ##STR1## wherein n is a positive integer corresponding to the number of units in the polymer and is sufficiently large to provide the polymer with a number average molecular weight of about 1500-15,000 as determined by vapor pressure osmometry, and wherein for any particular unit in the polymer:.fwdarw.denotes isomerism;

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patent: 3957512 (1976-05-01), Kleeberg et al.
patent: 4112139 (1978-09-01), Shirk et al.
patent: 4310641 (1982-01-01), Ohmura et al.
patent: 4311785 (1982-01-01), Ahne et al.

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