Semiconductor acceleration sensor and testing method thereof

Details Semiconductor acceleration sensor and testing method thereof Semiconductor acceleration sensor and testing method thereof

1994-06-01

1996-06-18

Williams, Hezron E.

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

7351432, 7351433, G01P 1508

Patent

active

055266878

ABSTRACT:
A semiconductor acceleration sensor includes a silicon detecting member integrally processed from a silicon substrate, having a weight, a supporting portion, and a beam for coupling the weight with the supporting portion, at least one semiconductor strain gauge being formed on an upper surface of the beam; an upper glass provided on an upper portion of the silicon detecting member, and having a concave by which the weight is displaceable; and a lower glass provided on a lower portion of the silicon detecting member, and having a concave by which the weight is displaceable. The supporting portion of the silicon detecting member is electrostatically jointed with the upper glass and the lower glass, respectively; and conductive film is formed on the concave of the lower glass; and an opening portion through which a wiring pattern is externally derived from the conductive film is formed in the lower glass.

REFERENCES:
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patent: 5060504 (1991-10-01), White et al.
patent: 5103667 (1992-04-01), Allen et al.
patent: 5121180 (1992-06-01), Beringhause et al.
patent: 5233874 (1993-08-01), Putty et al.
patent: 5369057 (1994-11-01), Lee et al.
"Die Sensoren der 90er Jahre" Lemme Electronik Jul. 1991, pp. 142-150.

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