Scanning probe microscope using stored data for vertical probe p

Details Scanning probe microscope using stored data for vertical probe p Scanning probe microscope using stored data for vertical probe p

1992-11-30

1994-05-03

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

250306, H01J 314

Patent

active

053089740

ABSTRACT:
An apparatus and method for scanning a probe over a surface to either produce a measurement of the surface representative of a parameter other than the topography of the surface or to perform a task on the surface. The scanning operation is divided into two parts and with a first scan to obtain and store topographical information and with a second scan to measure the parameter of the surface other than topography or to perform the task while the probe height is controlled using the stored topographic information.

REFERENCES:
patent: 4766311 (1988-08-01), Seiler et al.
patent: 5128544 (1992-07-01), Iwatsuki
patent: 5198667 (1993-03-01), Glembocki et al.
patent: 5210410 (1993-05-01), Barrett

Affiliated with

Also associated with

Rating

Scanning probe microscope using stored data for vertical probe p does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Scanning probe microscope using stored data for vertical probe p, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Scanning probe microscope using stored data for vertical probe p will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2116071