Focused ion beam micromachining of optical surfaces in materials

Details Focused ion beam micromachining of optical surfaces in materials Focused ion beam micromachining of optical surfaces in materials

1986-05-01

1987-10-06

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156655, 156662, 156903, 20419234, 437 20, H01L 21306, B44C 122, C03C 1500, C03C 2506

Patent

active

046981292

ABSTRACT:
A method of forming one or more optical surfaces of the designer's choice in a body of material. The method includes the steps of exposing in a work zone a selected face in a body of selected material, directing a focused ion beam in a predetermined manner into the work zone to impinge the selected face, and by such directing and impinging, removing material from the body to create the desired optical surface(s). Preferably, beam direction is accomplished under the control of a suitably programmed computer.

REFERENCES:
patent: 3988564 (1976-10-01), Garvin et al.
patent: 4075452 (1978-02-01), Simon
patent: 4128467 (1978-12-01), Fischer
patent: 4169009 (1979-09-01), Wagner
patent: 4275286 (1981-06-01), Hackett
patent: 4389275 (1983-06-01), Ballato
patent: 4426582 (1984-01-01), Orloff
patent: 4457803 (1984-07-01), Takigawa

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