Electrostatic positioner

Details Electrostatic positioner Electrostatic positioner

1993-06-09

1994-04-12

Pellinen, A. D.

Electricity: electrical systems and devices

Electric charge generating or conducting means

Use of forces of electric charge or field

156DIG62, H02N 1300

Patent

active

053031172

ABSTRACT:
An electrostatic positioner with one or more first electrodes for producing forces to confine a charged specimen in the direction perpendicular to a center axis and second electrodes for producing forces to confine the charged specimen in the direction of the center axis.

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W. K. Rhim, et al., "Development of an Electrostatic Positioner for Space Material Processing" Feb. 1985; Review of Scientific Instruments, pp. 307-317.

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