Method for making a symmetrical layered thin film edge field-emi

Details Method for making a symmetrical layered thin film edge field-emi Method for making a symmetrical layered thin film edge field-emi

1992-11-30

1993-11-30

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156644, 156657, 156656, 156662, 437195, 437228, B44C 122, C23F 100, C03C 1500, C03C 2506

Patent

active

052661555

ABSTRACT:
A field-emitter-array device includes a substrate supporting thin-film las of conductive material and intervening thin-film layers of insulative material. The lateral edges of the thin-film layers form a field emitter array including a field-emitter edge electrode interposed between a pair of control electrodes. The control electrode edges produce a symmetric field causing the flow of field emitted electrons to be substantially parallel to the plane of the control and field-emitter edge electrodes. The direction of electron flow can be further controlled by additional electrodes in the form of additional thin-film conductive layers or external electrodes. A process for making the emitter device includes forming on a support member a plurality of planar first and second thin-film layers of insulative material alternately disposed between first, second and third thin-film layers of conductive material, forming a channel through the thickness of the layers and oriented perpendicular thereto, exposing the lateral edges of the layers of conductive and insulative materials adjacent to the channel to form a field emitter edge electrode interposed between a pair of control electrodes. Additional electrodes may be provided to form and deflect the electron flow.

REFERENCES:
patent: 3753022 (1973-08-01), Fraser, Jr.
patent: 3755704 (1973-08-01), Spindt et al.
patent: 4307507 (1981-12-01), Gray et al.
patent: 4498952 (1985-02-01), Christensen
patent: 4578614 (1986-03-01), Gray et al.
patent: 4728851 (1988-03-01), Lambe
patent: 4827177 (1989-05-01), Lee et al.

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