Method of making a digital flexure beam accelerometer

Details Method of making a digital flexure beam accelerometer Method of making a digital flexure beam accelerometer

1990-10-12

1993-03-09

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156656, 156645, B44C 122, C23F 100

Patent

active

051923955

ABSTRACT:
It is possible to determine acceleration using an array of micro-machined elements. The invention described herein details how to do so by fabricating an array of structures with a substrate, addressing circuitry, a spacer layer forming a well over the addressing circuitry, and a deflection element over the well. The deflection elements are configured so each element is deflected by a higher acceleration. The invention also shows one embodiment of the invention.

REFERENCES:
patent: 4553436 (1985-11-01), Hansson
patent: 4566935 (1986-01-01), Hornbeck
patent: 4662746 (1987-05-01), Hornbeck
patent: 4710732 (1987-12-01), Hornbeck
patent: 4855544 (1989-08-01), Glenn
patent: 4954789 (1990-09-01), Sampsell
patent: 4956619 (1990-09-01), Hornbeck
"Accelerometer Systems with Self-Testable Features", Allen, et al. Sensors and Actuators, vol. 20, 1989, pp. 153-161.
"A Miniature Silicon Accelerometer with Build-In Dumping", Stephen Terry, paper written for presentation.

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