Method of manufacturing target of image pickup tube

Details Method of manufacturing target of image pickup tube Method of manufacturing target of image pickup tube

1980-12-02

1982-05-25

Massie, Jerome W.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156657, 1566591, 156655, 313386, 313390, 427 75, 427250, 427 99, H01J 3126

Patent

active

043315062

ABSTRACT:
A method of manufacturing a target of an image pickup tube comprising the steps of: forming a plurality of groups of transparent conductive signal electrodes on a transparent insulating base plate; forming a first layer on at least a portion constituting an image area of the image pickup tube, said first layer being substantially insoluble in etching liquid used for etching an insulating layer to constitute an intermediate layer insulator in a double layered interconnection structure; forming, after formation of said first layer, an insulating layer to constitute said intermediate-layer insulator; removing a predetermined portion of said insulating layer, removing said first layer together with said insulating layer located thereon; forming bus bars; and forming a photoconductive layer on said plurality of groups of the transparent conductive signal electrodes.
This invention provides an excellent method for mass production.

REFERENCES:
patent: 3986069 (1976-10-01), Funahashi
patent: 3997810 (1976-12-01), Tsutsui et al.
patent: 4107568 (1978-08-01), Nakano et al.
patent: 4181755 (1980-01-01), Liu et al.
patent: 4251909 (1981-02-01), Hoeberechts
Sasano et al., "A Novel . . . Camera", IEDM Technical Digest 1974, pp. 74-77.
Borkar "Simultaneous . . . Vidicon", RCA Review, Mar. 1960, pp. 3-16.
Weimer et al., "A Development . . . Target", IRE Transactions on Electron Devices, Jul. 1960, pp. 147-153.
Gray et al., "Production . . . Evaporation", RCA Review, Sep. 1959, pp. 413-425.

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