Single crystal rod pull-up growing apparatus

Details Single crystal rod pull-up growing apparatus Single crystal rod pull-up growing apparatus

1992-08-24

1994-12-06

Breneman, R. Bruce

Single-crystal, oriented-crystal, and epitaxy growth processes;

Apparatus

With means for measuring, testing, or sensing

117 14, 117208, C30B 1520

Patent

active

053700775

ABSTRACT:
The present invention provides control of single crystal growth after the recovery from power failure when controlling crystal growth in an automatic mode. A source voltage is supplied to a controller 70 through a no-break power supply 62. At the time of recovery from power failure, the controller continues the automatic operation mode with the same control output as that stored when power failure is detected (84, 85) if the power failure time t is t .ltoreq.t.sub.1 (for example, 1 second), switches the control mode to the manual control mode with the same control output as that stored when the power failure is detected (86, 87) if t.sub.1 <t.ltoreq.t.sub.2 (for example, 5 seconds), stops the crystal growth operation and switches the control mode to the manual control mode (88, 89) if t.sub.2 <t.ltoreq.t.sub.3 (for example, 600 seconds), and separates the grown crystal from a melt 22 by upwardly moving the crystal and upwardly moves a crucible 16 (90) if t>t.sub.3.

REFERENCES:
patent: 3284172 (1966-11-01), Binder
patent: 3714452 (1973-01-01), Williamson
patent: 4384214 (1983-05-01), Crick et al.
patent: 4686379 (1987-08-01), Ohnari
patent: 4926357 (1990-05-01), Katsuoka et al.
patent: 5089238 (1992-02-01), Araki et al.
patent: 5156822 (1992-10-01), Whipple, III
Patent Abstracts of Japan, vol. 14, No. 270, Jun. 12, 1990, JP-A-20 80 400, Mar. 20, 1990.

Affiliated with

Also associated with

Rating

Single crystal rod pull-up growing apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Single crystal rod pull-up growing apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Single crystal rod pull-up growing apparatus will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-207524