Shielded heat sensor for measuring temperature

Details Shielded heat sensor for measuring temperature Shielded heat sensor for measuring temperature

1995-01-17

1998-02-10

Bennett, G. Bradley

Thermal measuring and testing

Temperature measurement

In spaced noncontact relationship to specimen

G01J 506

Patent

active

057161330

ABSTRACT:
A sensor for measuring the temperature of a workpiece including a substrate, wafer, shield or other element in a semiconductor processing system. In the illustrated embodiment, the sensor has a heat shield to reflect away from the heat sensing element, heat from unwanted sources such as susceptors and heating cartridges which can adversely affect the accuracy of the measurement. In addition, the heat shield preferably has a small thermal mass for improved responsivity.

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Dahlke, G.P. et al., "Heat Focusing Shield in an Evaporation Chamber," IBM Technical Disclosure Bulletin, vol. 19, No. 4, Sep. 1976, p. 1252.
Watlow Series 988/989 User's Manual, p. 52, Sep. 1993, Watlow Chemicals, Winona, MN.
Omega Catalog, pp. A-9--A-10, A-31--A-32, date unavailable, Omega Engineering, Stanford, CT, prior to filing date of present application.

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