Methods for preparing ruthenium metal films

Details Methods for preparing ruthenium metal films Methods for preparing ruthenium metal films

1998-08-27

2000-06-13

Meeks, Timothy

Semiconductor device manufacturing: process

Coating with electrically or thermally conductive material

To form ohmic contact to semiconductive material

438686, 427124, 427252, 427253, 4273831, 4273833, C23C 1616

Patent

active

060749458

ABSTRACT:
The present invention provides methods for the preparation of ruthenium metal films from liquid ruthenium complexes of the formula (diene)Ru(CO).sub.3 wherein "diene" refers to linear, branched, or cyclic dienes, bicyclic dienes, tricyclic dienes, fluorinated derivatives thereof, derivatives thereof additionally containing heteroatoms such as halide, Si, S, Se, P, As, N, or 0, or combinations thereof.

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