Electricity: electrical systems and devices – Electrostatic capacitors – Fixed capacitor
Patent
1996-07-03
1998-04-21
Ledynh, Bot L.
Electricity: electrical systems and devices
Electrostatic capacitors
Fixed capacitor
361313, 3613215, 257306, 257308, 257309, 438387, 438396, 438397, H01G 406
Patent
active
057424721
ABSTRACT:
A method for fabricating a capacitor on a substrate includes the steps of forming an insulating layer on the substrate, and forming the first plate electrode on the insulating layer. A first dielectric layer is then formed on the plate electrode, and a first common storage electrode is formed on the first dielectric layer. A contact hole is then formed through the insulating layer, the first plate electrode, the first dielectric layer, and the first common storage electrode, thereby exposing a predetermined portion of the substrate. A first spacer is formed on a sidewall of the contact hole, and a conductive plug is formed in the contact hole extending from the substrate to the first common storage electrode.
REFERENCES:
patent: 5583068 (1996-12-01), Jones, Jr. et al.
patent: 5583360 (1996-12-01), Roth et al.
Yamaguchi et al., Structural and Electrical Characterization of SrTiO.sub.3 Thin Films Prepared by Metal Organic Chemical Vapor Deposition, Jpn. J. Appl. Phys., vol. 32, Part 1, No. 9B, Sep. 1993, pp. 4069-4073.
Lee Hyeon-deok
Lee Myoung-Bum
Ledynh Bot L.
Samsung Electronics Co,. Ltd.
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