Microbellows actuator

Details Microbellows actuator Microbellows actuator

1999-10-26

2000-11-14

Gulakowski, Randy

Etching a substrate: processes

Etching of semiconductor material to produce an article...

216 95, 216 99, B81B 300, B82B 300

Patent

active

061465437

ABSTRACT:
A micromachined multi-layered microbellows-style actuator capable of delivering larger deflections compared to a single layered flat membrane of comparable size. Anchor structures are disclosed that improve the strength of the microbellows membrane. A characterization apparatus is used to measure microbellows membrane performance. Thermopneumatic actuators having a resistive heater chip are also disclosed. The microbellows membrane is manufactured by alternating deposition of structural layers and sacrificial layers on a substrate. The structural layers can be made of silicon nitride and the sacrificial layers can be made of polysilicon. The substrate is etched from the back to form an opening exposing the sacrificial layers, and then the membrane is released by etching away the sacrificial layers.

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Barron, C.C. et al "Sample (Sandia Agile MEMS Prototyping, Layout tools, and Education)" Proceedings of SPIE, Micromachining and Microfabrication Process Technology III, vol. 3223, pp. 10-15, Sep. 1997.

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