Electricity: measuring and testing – Magnetic – With means to create magnetic field to test material
Patent
1997-07-11
1999-10-19
Patidar, Jay M.
Electricity: measuring and testing
Magnetic
With means to create magnetic field to test material
73159, 27126504, G01B 706, G01B 1306, G01B 1312
Patent
active
059695218
ABSTRACT:
An automatic measuring apparatus is capable of measuring the thickness of a work piece with a high degree of precision. Distance data for carriers is removed from distance data representative of the distances between a pair of surface plates which are detected in a non-contact manner. An eddy current sensor mounted on a first surface plate detects a distance therefrom to a second surface plate and generates a corresponding analog voltage signal. When the eddy current sensor enters and exits a space between two adjacent carriers, voltage signals are generated. The voltage signals are processed to determine the voltage value of a digital voltage signal that has a maximum frequency or a maximum number of occurrences among the voltage signals being processed. The resultant determination is used to arrive at the work piece thickness.
REFERENCES:
patent: 4019131 (1977-04-01), Yamada et al.
patent: 4407094 (1983-10-01), Bennett et al.
patent: 4433510 (1984-02-01), Katagiri et al.
patent: 4814703 (1989-03-01), Carr et al.
Kurita Tamotsu
Nagai Manabu
Patidar Jay M.
Speedfam Co., Ltd.
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