Semiconductor memory device and fabricating method

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

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257350, H01L 27108

Patent

active

061406732

ABSTRACT:
In a high-integration DRAM device using a SOI substrate, a conductive film for connecting the source region or the drain region to the polysilicon film filled in the trench is formed in an etched-off portion of the insulating layer of the SOI substrate.

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patent: 5493137 (1996-02-01), Satoh et al.
patent: 5495439 (1996-02-01), Morihara
patent: 5770876 (1998-06-01), Lam et al.

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