Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Patent
1997-11-03
2000-10-31
Prenty, Mark V.
Active solid-state devices (e.g., transistors, solid-state diode
Field effect device
Having insulated electrode
257350, H01L 27108
Patent
active
061406732
ABSTRACT:
In a high-integration DRAM device using a SOI substrate, a conductive film for connecting the source region or the drain region to the polysilicon film filled in the trench is formed in an etched-off portion of the insulating layer of the SOI substrate.
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Kabushiki Kaisha Toshiba
Prenty Mark V.
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