Thin epitaxy resurf integrated circuit containing high voltage p

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

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257409, 257492, H01L 2976, H01L 2994, H01L 2358

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active

058523146

ABSTRACT:
N-channel LDMOS and p-channel MOS devices for high voltage integrated in a BiCMOS integrated circuit and exploiting a RESURF condition are provided with a buried region of the same type of conductivity of the epitaxial layer and a doping level intermediate between the doping level of the epitaxial layer and the doping level of a well region. The devices may be configured as source or drain followers without problems.

REFERENCES:
patent: 4300150 (1981-11-01), Colak
patent: 5043788 (1991-08-01), Omoto et al.
Thin Layer High-Voltage Devices (Resurf Devices) by J. A. Appels, et al., Philips J. Res. 35, 1-13, 1980.
IEEE Transactions of Electron Devices, vol. 38, No. 7, Jul. 1991, New York, pp. 1582-1589.
Adriaan W. Ludikhuize, "A Versatile 700-1200-V IC Process for Analog and Switching Applications.".
IEEE Transactions on Electron Devices, vol. 38, No. 8, Aug. 1991, New York, pp. 1935-1942.
Wai Tung Ng et al., "A CMOS-compatible Complementary SINFET HVIC Process," p. 1936/.

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