Photosensitive composition comprising a sulfonimide compound acc

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making

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4302701, 522 59, 522 65, G03C 173

Patent

active

056983697

ABSTRACT:
Disclosed is a photosensitive composition comprising a sulfonimide compound represented by formula (I):

REFERENCES:
patent: 4639408 (1987-01-01), Kitaguchi et al.

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