Fishing – trapping – and vermin destroying
Patent
1996-03-15
1997-12-30
Fourson, George R.
Fishing, trapping, and vermin destroying
437195, 437231, 437238, H01L 2128
Patent
active
057029806
ABSTRACT:
A defect free intermetal dielectric, IMD, and method of forming the defect free IMD are described. The IMD uses spacers formed by means of etchback of a layer of spin-on-glass, SOG. In order to use an oxide layer formed by means of plasma enhanced tetra-ethyl-ortho-silicate, PE-TEOS, as part of the IMD an oxide cap layer formed using plasma enhanced chemical vapor deposition, PE-CVD, is used to isolate the SOG spacers from the PE-TEOS formed oxide layer. By isolating the PE-TEOS formed oxide layer from the SOG spacers a reliable and defect free IMD is achieved.
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Jang Sylin-Ming
Yu Chen-Hua Douglas
Ackerman Stephen B.
Bilodeau Thomas G.
Fourson George R.
Prescott Larry J.
Saile George O.
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