Monopole magnetic lens field

Details Monopole magnetic lens field Monopole magnetic lens field

1991-08-06

1993-12-07

Berman, Jack I.

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

250310, 250398, H01V 37141

Patent

active

052685799

ABSTRACT:
In an electron optical system a monopole shaped magnetic field is introduced enabling an aberration free imaging writing or detection in the system. Apparatus based on this field distribution result in improved secondary electron detection such as for chip inspection, in improved resolution in Auger electron detection for analysis, in a higher exactness in chip production in an electron beam pattern generator and in an electron beam image projector in which now also size reduction can aberration free be introduced.

REFERENCES:
patent: 3509503 (1970-04-01), Yanaka et al.
patent: 4384208 (1983-05-01), Tsuno
patent: 4565877 (1986-01-01), Ezaki et al.
patent: 4771350 (1988-09-01), Desserre
patent: 4808821 (1989-02-01), Feuerbaum et al.

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