Radiant energy – Inspection of solids or liquids by charged particles – Methods
Patent
1995-04-13
1996-11-05
Anderson, Bruce C.
Radiant energy
Inspection of solids or liquids by charged particles
Methods
25044211, 2504911, H01J 3720
Patent
active
055720269
ABSTRACT:
A method for processing sample material for use with transmission electron microscopes utilizes a sheet mesh for supporting the sample material during irradiation processing. The sheet mesh is formed of a metallic sheet material having a single opening provided in a central portion thereof, a circumferential edge portion of the opening is tapered from one side of the sheet mesh through to the other and the angle of the taper corresponds to the angle of irradiation. Position determining portions are provided on the sheet mesh to assure reliable positioning of the sample material. Also, the method provides a for preparation of the sample material including a protective layer formed over a membrane layer for allowing adhesion of membrane layers made of materials which would otherwise degrade the adhesion layer during processing.
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Anderson Bruce C.
Kananen Ronald P.
Sony Corporation
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