Fishing – trapping – and vermin destroying
Patent
1989-12-22
1992-03-24
Chaudhuri, Olik
Fishing, trapping, and vermin destroying
437 94, 437 95, 437959, 156613, H01L 2120
Patent
active
050988573
ABSTRACT:
A method of forming semi-insulating gallium arsenide by oxygen doping in a metal-organic vapor phase epitaxy system. The metal organic reactant gas containing aluminum and oxygen is introduced into the reaction chamber together with the gallium and arsenic containing reactant gases. A deep level oxygen impurity is incorporated into the growing gallium arsenide layer to form semi-insulating gallium arsenide.
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Kuech Thomas F.
Tischler Michael A.
Bunch William D.
Chaudhuri Olik
International Business Machines Corp.
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