Process for the production of dielectric layers in planar circui

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device

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430198, 430330, G03C 500

Patent

active

050988158

ABSTRACT:
Apertures with inclined sidewalls are produced in a dielectric layer by exposing a photoformable dielectric layer through a mask having a section without a sharp line of demarcation between opaque and transparent areas.

REFERENCES:
patent: 4912022 (1990-03-01), Urquhart et al.
Watanabe et al., "Thick Film Fine Pattern Formation . . . ", Conf: Proceedings 29th Electronic Component Conf., N.J., May 1979.

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