Fluid handling – Systems – Multi-way valve unit
Patent
1989-11-17
1991-03-19
Rivell, John
Fluid handling
Systems
Multi-way valve unit
137566, 137887, 251192, 118 50, 437228, F16K 2500
Patent
active
050002252
ABSTRACT:
A combination gate valve and throttle valve is presented for use between a process chamber and at least one pump includes a base plate a lower plate and a gate plate. The base plate is attached to the process chamber and includes a base plate gas port for each pump in the system. Each pump is attached to the lower plate. Where each pump is attached to the lower plate there is a lower plate gas port. Each of the lower plate gas ports lines up with one of the base plate gas ports. The gate plate is attached between the lower plate and the base plate. The gate plate has gate plate gas ports so that when the gate plate is moved into an open position with respect to the base plate and the lower plate, the gate plate gas ports line up with the lower plate gas ports and the base plate gas ports allowing gas to flow from the process chamber through the gas ports to the pumps. When the gate plate is moved into a closed position the process chamber is selaed from the pumps. The process chamber is now isolated from the pumps allowing the pumps to be removed without contaminating the process chamber.
REFERENCES:
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patent: 3414007 (1968-12-01), DeMarco
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patent: 4089735 (1978-05-01), Sussmann
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patent: 4899685 (1990-02-01), Kawakami
patent: 4899686 (1990-02-01), Toshima et al.
"Fishtail vs. Conventional Discs in Butterfly Valves", Carl D. Wilson, Instruments & Control Systems, vol. 41; Mar. 1968.
"The Note on the Reduction of the Fluid Dynamic Torque of Butterfly Valves", D. W. Bryer/D. E. Walshe, National Physical Laboratory; Sep. 1986.
Applied Materials Inc.
Rivell John
Weller Douglas L.
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