Method for fabricating a silicon accelerometer responsive to thr

Details Method for fabricating a silicon accelerometer responsive to thr Method for fabricating a silicon accelerometer responsive to thr

1990-01-09

1991-01-01

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156651, 156654, 1566591, 156662, H01L 21306, B44C 122, C03C 1500, C03C 2506

Patent

active

049815520

ABSTRACT:
An accelerometer fabricated from silicon which is responsive to the three orthogonal components of an applied force. A method is also disclosed for etching the accelerometer from a single silicon substrate. Three rectangular beams or cantilevers are formed each having vertical sidewalls lying in crystalline planes orthogonal to one another. Each of the beams is directly responsive to one of the three orthogonal force components.

REFERENCES:
patent: 4600934 (1986-07-01), Aine et al.
patent: 4732647 (1988-03-01), Aine
patent: 4783237 (1988-11-01), Aine et al.
patent: 4891255 (1990-01-01), Ciarlo
patent: 4893509 (1990-01-01), MacIver et al.
Article Entitled, "Tuning Forks in Silicon", by Rudolf A. Buser, Nico F. de Rooij; pp. 94 & 95 of IEEE Catalog Number 89THO249-3, dated Feb. 20-22, 1989.
Article Entitled, "Realization of a Mesa Array in (001) Oriented Silicon Wafers for Tactile Sensing Applications", by R. Buser, B. Stauffer, N. F. de Rooij; pp. 879 & 800 of Extended Abstracts, vol. 86-2, dated Oct. 19-24, 1986.

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