Electron energy filter and transmission electron microscope prov

Details Electron energy filter and transmission electron microscope prov Electron energy filter and transmission electron microscope prov

1995-07-14

1996-12-17

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

250305, 250396ML, H01J 4946

Patent

active

055856306

ABSTRACT:
An electron energy filter is structured by superposing a pair of yokes having electron beam passage holes and pole pieces on each side facing each other so as that the pole pieces are positioned facing each other with a certain space in between, and the electron energy filter is mounted in a transmission electron microscope to obtain a stable elemental mapping image.

REFERENCES:
patent: 5097126 (1992-03-01), Krivanek
patent: 5177361 (1993-01-01), Krahl et al.
patent: 5448063 (1995-09-01), De Jong et al.
patent: 5449914 (1995-09-01), Rose et al.
Ultramicroscopy 18 (1985) 159-164, North-Holland, Amsterdam, T. Oikawa et al.: Construction of an Energy Filter for 200 kV CTEM no month.

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