Process for fabricating micromachines

Details Process for fabricating micromachines Process for fabricating micromachines

1992-05-26

1994-11-22

McFarlane, Anthony

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156643, 156653, 156657, 310309, 505785, H01L 21306

Patent

active

053665872

ABSTRACT:
A process for manufacturing a micromachine comprising a machine element supported on a substrate, comprising the steps of successively depositing on the substrate machine part layers and removable sacrificial layers made of an oxide ceramic material containing a rare earth, Ba, and Cu, and selectively removing the machine parts layer and the sacrificial layers so as to leave the machine element.

REFERENCES:
patent: 4851080 (1989-07-01), Howe et al.
patent: 4943750 (1990-07-01), Howe et al.
patent: 4997521 (1991-03-01), Howe et al.
patent: 5043043 (1991-08-01), Howe et al.
patent: 5180940 (1993-01-01), Paratte et al.
Mehregany et al, "Integrated Fabrication of Polysilicon Mechanisms", Jun. 1988, pp. 719-723.

Affiliated with

Also associated with

Rating

Process for fabricating micromachines does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Process for fabricating micromachines, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Process for fabricating micromachines will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1988965