Method of forming fine patterns

Details Method of forming fine patterns Method of forming fine patterns

1990-07-18

1991-08-06

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156631, 156634, 156643, 156656, 156657, 1566591, 156151, 156241, 156902, 156904, 204 17, H01L 21306, C23F 102, B44C 122, C03C 1500

Patent

active

050375040

ABSTRACT:
A fine pattern is formed by the following steps. A prescribed mask pattern of an electrically insulative material is formed on an electroconductive surface of a base plate of a printing plate, so that the part, other than the mask pattern, of the printing plate becomes an electroconductive printing pattern part. Then, electrolysis is carried out in an electrolyte containing an electrodeposition substance as an ingredient with the printing plate as one electrode and with an opposing electrode, both immersed in the electrolyte, so that the electrodeposition substance is deposited on the electroconductive printing pattern part of the printing plate. Thereafter, the printing plate is withdrawn out from the electrolyte, washed and dried. Then, the deposited substance is transferred onto the surface of a printing object such as a plate of glass or plastic, for forming a pattern thereon. Thereafter, the surface of the printing object is etched with the electrodeposited substance thus transferred as an erosion resistant material. The transfer of the electrodeposition substance without consistency from the printing plate onto the surface of the printing object, followed by etching of the printing object surface, enables an accurate reproduction of a fine pattern on the printing object.

REFERENCES:
patent: 2666008 (1954-01-01), Enslein et al.
patent: 4746399 (1988-05-01), Demmer et al.
patent: 4861438 (1989-08-01), Banks et al.

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