Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Patent
1995-06-07
1997-02-25
Hamilton, Cynthia
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Radiation sensitive composition or product or process of making
4302831, 4302701, 522 15, 522 25, 522 31, 522173, 522167, 522126, 522146, G03F 70269, G03F 7039, G03F 7004
Patent
active
056057814
ABSTRACT:
A photosensitive composition containing a curable cyanate ester and a cationic photoinitiator; and use thereof to form a resist image.
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Gelorme Jeffrey D.
Skarvinko Eugene R.
Wang David W.
Hamilton Cynthia
International Business Machines - Corporation
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