Method and apparatus for fabricating products using alignment me

Details Method and apparatus for fabricating products using alignment me Method and apparatus for fabricating products using alignment me

1995-12-26

1998-05-26

Hantis, K.

Optics: measuring and testing

By alignment in lateral direction

With light detector

2505593, G01B 1100

Patent

active

057575037

ABSTRACT:
A method and apparatus measures a deviation in alignment between two components of a product wherein each component is characterized by a respective pattern and wherein each pattern comprises respective elements. The centroid of each element in each respective pattern is indicated, and based on the centroid indications, the center of each respective pattern is indicated. The deviation in alignment between the two components is determined as a function of the indicated position of the centers of the respective patterns, and positioning of the components is controlled as a function of the indicated position of the centers of the respective patterns.

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