Method and device of testing semiconductor integrated circuit ch

Details Method and device of testing semiconductor integrated circuit ch Method and device of testing semiconductor integrated circuit ch

1999-04-26

2000-10-24

Nguyen, Vinh P.

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

324750, G01R 3100

Patent

active

061373044

ABSTRACT:
A supersonic wave beam producing device projects a supersonic wave beam 5 on a semiconductor integrated circuit chip 2 while a voltage is supplied to a semiconductor integrated circuit in the chip from a constant voltage source 1. A current detecting device 7 detects a change of a current in the circuit while the chip is supplied with the supersonic wave beam. In this event, the constant voltage source may be omitted. A supersonic wave beam producing device may project a supersonic wave beam 5 on a semiconductor integrated circuit chip 2 while a current is supplied to a semiconductor integrated circuit. In this event, a voltage detecting device detects a change of a voltage between two ones of terminals of the circuit.

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K. Nikawa, et al., "Internal Current Imaging of Integrated Circuit Using Optical/Electron/Ion Beam Induced Resistance Change Method," TLSI (Dec. 8-9, 1994), pp. 204-208.

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