Scanning probe/optical microscope with modular objective/probe a

Details Scanning probe/optical microscope with modular objective/probe a Scanning probe/optical microscope with modular objective/probe a

1996-03-04

1998-05-26

Anderson, Bruce

Radiant energy

Inspection of solids or liquids by charged particles

H01J 3726

Patent

active

057569975

ABSTRACT:
A scanning probe and optical microscope for inspecting an object the comprises a microscope stand to support the object, a modular objective/probe unit, a modular drive/detector unit, and an optical observation head. The modular objective/probe unit is removably attached to the microscope stand and comprises a probe with a cantilever and a tip on the cantilever. It also comprises a movement mechanism attached to the cantilever to move the cantilever so that the tip is moved over the object. It further comprises objective optics. The modular detector unit is removably attached to the microscope stand and comprises detection optics optically coupled to the objective optics. The detection optics direct deflection detecting light to the objective optics which focus the deflection detecting light on the cantilever so that the cantilever reflects the deflection detecting light as the tip is moved over the object. The objective optics direct the reflected deflection detecting light to the detection optics so that the detection optics detects the reflected deflection detecting light for measuring the deflection of the cantilever as the tip is moved over the object. The optical observation head comprises image forming optics optically coupled to the objective optics. The image forming optics direct object observing light to the objective optics which focus the object observing light on the object so that the object reflects the object observing light. The objective optics direct the reflected object observing light to the image forming optics so that the image forming optics focus the reflected object observing light to form an image of the object for observation.

REFERENCES:
patent: 4999495 (1991-03-01), Miyata et al.
patent: 5142145 (1992-08-01), Yasutake
patent: 5260824 (1993-11-01), Okada et al.
patent: 5360977 (1994-11-01), Onuki et al.
patent: 5408094 (1995-04-01), Kajimura
patent: 5455420 (1995-10-01), Ho et al.
patent: 5463897 (1995-11-01), Prater et al.
patent: 5510615 (1996-04-01), Ho et al.
patent: 5560244 (1996-10-01), Prater et al.

Affiliated with

Also associated with

Rating

Scanning probe/optical microscope with modular objective/probe a does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Scanning probe/optical microscope with modular objective/probe a, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Scanning probe/optical microscope with modular objective/probe a will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1964151