Semiconductor device manufacturing: process – With measuring or testing – Electrical characteristic sensed
Patent
1998-11-20
2000-10-24
Booth, Richard
Semiconductor device manufacturing: process
With measuring or testing
Electrical characteristic sensed
436 14, 702 59, 714 25, 714736, 714724, 714741, 324531, G01R 3126, H01L 2166
Patent
active
061366188
ABSTRACT:
A semiconductor device manufacturing process diagnosis system including a visual inspection device for detecting a physically abnormal part of a semiconductor device to be diagnosed, an LSI tester for measuring electrical characteristics of a semiconductor device and a diagnosis device and characterized in that the diagnosis device extracts, from among circuit blocks constituting a semiconductor device, a block contained in a predetermined region covering a physically abnormal part, determines whether an extracted block and an abnormal block causing abnormality of electrical characteristics are the same, with respect to a block discriminated as an abnormal block, detects a position causing abnormality of electrical characteristics within the block, and depending on whether a detected position substantially coincides with a physically abnormal part, determines whether abnormality of electrical characteristics derives from physical abnormality.
REFERENCES:
patent: 5790565 (1998-08-01), Sakaguchi
patent: 5944847 (1999-08-01), Sanada
Booth Richard
Murphy John
NEC Corporation
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