Field effect transistor with barrier layer

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

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257347, 257383, 257751, H01L 2701, H01L 2976, H01L 2348

Patent

active

058698744

ABSTRACT:
A field effect transistor includes, a silicon substrate having impurity doping of a first conductivity type; source and drain diffusion regions of a second conductivity type within the silicon substrate, the source region and the drain region being spaced from one another to define a channel region therebetween within the silicon substrate; a gate relative to the silicon substrate operatively adjacent the channel region; and respective ohmic electrical contacts to the source region and the drain region, the electrical contact to the source region comprising a substrate leaking junction, the electrical connection to the drain region not comprising a substrate leaking junction.

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F. Pintchoviski et al., "TiN Metallization Barriers: From 1.2v to 0.35v Technology", Mat. Res. Soc. Symp., vol. 260, 1992, pp. 777-785.
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