Scanning probe microscope

Details Scanning probe microscope Scanning probe microscope

1992-06-02

1995-02-21

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

73105, 369126, H01J 3726

Patent

active

053918711

ABSTRACT:
A scanning type probe microscope apparatus for measuring a surface state of a sample by scanning the sample by use of a probe is disclosed. In the apparatus, the sample is inclined relative to a scan direction of the probe by a inclination mechanism. Of a signal component corresponding to the surface state of the sample, a signal component having an optional space frequency is selected to be detected by a detecting circuit. The inclination mechanism is controlled on the basis of a detection result of the detecting circuit.

REFERENCES:
patent: 3903735 (1975-09-01), Wilson
patent: 5107112 (1992-04-01), Yanagisawa et al.
"A three-dimensional surface profile measuring system with a specimen-levelling device" by T. Kanada et al.; Measurement Science and Technology 2(1991) Mar., No. 3, Bristol, BG pp. 191-196.
"Scanning tunneling microscopy" by G. Binnig et al. Helvetica Physica Acta vol. 55, 1982; pp. 728-735.

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