Method for the contamination-free size reduction of semiconducto

Solid material comminution or disintegration – Processes

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241 24, B02C 1918

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054641594

ABSTRACT:
Bodies of hyperpure semiconductor material can be reduced in size without ntamination by being subjected to shock waves. The method is preferably carried out at room temperature, so that diffusion into the interior of the semiconductor, which is induced and/or accelerated by high temperatures, is largely avoided for superficially adsorbed foreign particles. The shock waves are generated in a focal point of a semiellipsoidal reflector by electrical discharge between two electrodes.

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Derwent Abstract of DE 3428255, Feb. 21, 1985.
Derwent Abstract of DE 38 11 091, Oct. 12, 1989.
Derwent Abstract of DE 22 62 178, Jan. 24, 1974.

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