Process for the production of a magnetic head for perpendicular

Details Process for the production of a magnetic head for perpendicular Process for the production of a magnetic head for perpendicular

1987-04-14

1988-03-15

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

29603, 156653, 156656, 156657, 1566591, 156668, B44C 122, C23F 102, C03C 1500, C03C 2506

Patent

active

047311576

ABSTRACT:
In a magnetic material film is etched a first wide, closed channel leaving intact an elongated central portion having a rectilinear axis. A coil is formed in the channel and surrounds the central portion, while being electrically insulated by a dielectric layer. A second channel is etched in a dielectric layer having a planar lateral edge parallel to the axis of the central portion and a thin magnetic film is deposited. A dielectric layer is deposited and etched by RIE, so as to leave a wall on the lateral edge. The magnetic film is then chemically etched so as to leave behind only the portion deposited on the lateral edge. Finally, the second channel is filled with a third hard dielectric material similar to the first.

REFERENCES:
patent: 4078300 (1978-03-01), Lazzari
patent: 4190872 (1980-02-01), Jones et al.
patent: 4256514 (1981-03-01), Pogge
Journal of Applied Physics, vol. 53, No. 3, part II, Mar. 1982, pp. 2593-2595, American Institute of Physics, New York, US, M. Oshiki et al.
Patents Abstracts of Japan, vol. 4, No. 18 (E-171), 13 Feb. 1980, p. 35 & JP A 54 157 613 (Fujitsu K.K.).
Patents Abstracts of Japan, vol. 5, No. 146 (P-80) (818), 16 Sep. 1981; & JP A 56 80 814 (Fujitsu K.K.) 02-07-1981.
Patents Abstracts of Japan, vol. 6, No. 252 (P-161) (1130), 10 Dec. 1982; & JP A 57 147 117 (Sony K.K.).
Patents Abstracts of Japan, vol. 3, No. 56 (E-110), 15 May, 1979, p. 14, E 110; & JP A 54 34 219 (Canon K.K.).
Patents Abstracts of Japan, vol. 6, No. 46 (P-107) (924), 24 Mar. 1982; & JP A 56 163 517 (Fujitsu K.K.).

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