Method for restoring an electrostatic chuck force

Details Method for restoring an electrostatic chuck force Method for restoring an electrostatic chuck force

1997-10-29

2000-05-30

Fleming, Fritz

Electricity: electrical systems and devices

Electric charge generating or conducting means

Use of forces of electric charge or field

361212, 279128, H02N 1300

Patent

active

060697857

ABSTRACT:
A method for restoring an electrostatic chuck force of an electrostatic chuck in a plasma apparatus includes the steps of only supplying a source gas, and applying a source power, but not an RF bias, to the plasma apparatus to induce a positive plasma. The positive plasma discharges any accumulated negative charge on the electrostatic chuck.

REFERENCES:
patent: 5378311 (1995-01-01), Nagayama et al.
patent: 5507874 (1996-04-01), Su et al.
patent: 5573981 (1996-11-01), Sato
patent: 5585012 (1996-12-01), Wu et al.
patent: 5681424 (1997-10-01), Saito et al.
patent: 5746928 (1998-05-01), Yen et al.

Affiliated with

Also associated with

Rating

Method for restoring an electrostatic chuck force does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method for restoring an electrostatic chuck force, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for restoring an electrostatic chuck force will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1915283