Method for manufacturing substrates for depositing diamond thin

Details Method for manufacturing substrates for depositing diamond thin Method for manufacturing substrates for depositing diamond thin

1992-05-28

1993-10-12

Kunemund, Robert

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156613, 156DIG68, 423446, 427580, 427527, C30B 2508

Patent

active

052521745

ABSTRACT:
A method for manufacturing substrates for depositing diamond thin films is disclosed.
In the method, a hydrocarbon gas is discharge-decomposed, products generated by the discharge decomposition are accelerated to implant them in a surface layer of a substrate made of a material other than diamond and, thereby, the surface layer having bondings of carbon atoms and atoms compositing the substrate. Desirably, the substrate thus manufactured is subjected to a heat treatment at a temperature ranging from 800.degree. to 1,200.degree. C.

REFERENCES:
patent: 4997636 (1991-03-01), Prins
Kimura et al., "Thin Solid Films", 81 319-327 (1981).
Patent Abstracts of Japan, vol. 19, No. 247 (C-307) [1970], Oct. 3, 1985.

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