Process for making electrode with integral dielectric layer

Details Process for making electrode with integral dielectric layer Process for making electrode with integral dielectric layer

1977-10-17

1979-10-30

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

96 367, 156307, 156634, 156656, 156659, C23F 102

Patent

active

041727576

ABSTRACT:
A process of fabricating switching device electrodes with an integral dielectric layer. The method permits the dielectric layer to serve also as the photoresist during the electrode etching step of the process.

REFERENCES:
patent: 3469982 (1969-09-01), Celeste
patent: 3950569 (1976-04-01), Morgan
patent: 3950846 (1976-04-01), Johnson
patent: 3968336 (1976-07-01), Johnson
patent: 3969595 (1976-07-01), Johnson

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