Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent
1990-10-31
1992-04-07
Powell, William A.
Adhesive bonding and miscellaneous chemical manufacture
Delaminating processes adapted for specified product
Delaminating in preparation for post processing recycling step
156643, 156653, 156656, 156657, 156662, 156904, 156DIG68, 20419232, 252 791, 427 38, H01L 21306, B44C 122, C03C 1500, C23F 102
Patent
active
051024985
ABSTRACT:
It is proposed to widen the application of wet etching by making use of excellent masks. In advance of actually etching of the surface to be etched, the surface is coated with a patterned carbon coating as a mask by CVD. The carbon coating has a high degree of hardness comparable to that of diamond and has an excellent resistance to the attack of chemicals.
REFERENCES:
patent: 4053350 (1977-10-01), Olsen et al.
patent: 4620898 (1986-11-01), Banks et al.
patent: 4904338 (1990-02-01), Kozicki
Aoyagi Osamu
Itoh Kenji
Powell William A.
Semiconductor Energy Laboratory Co,. Ltd.
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