Image analysis – Applications – Manufacturing or product inspection
Patent
1996-01-11
1998-06-30
Mancuso, Joseph
Image analysis
Applications
Manufacturing or product inspection
348130, G06R 900
Patent
active
057745757
ABSTRACT:
An inspection apparatus and method includes an illuminator for projecting a light beam onto a substrate having a predetermined pattern formed thereon and a sensor for sensing light from the substrate and photoelectrically converting the light to an electrical signal. The electrical signal has a pattern signal component representing light from the predetermined pattern and a foreign matter signal component representing light from foreign matter on the substrate in the event foreign matter is on the substrate and is sensed by the sensor. The apparatus also includes a converter for converting the electrical signal output by the sensor into a digital signal having a pattern signal component and a foreign matter signal omponent in the event the electrical signal output by the sensor has a foreign matter signal component. The apparatus also includes a processor for performing calculation processing on the digital signal for discriminating the digital foreign matter signal component from the digital pattern signal component in the event the digital signal has a foreign matter signal component.
REFERENCES:
patent: 4653903 (1987-03-01), Torigoe et al.
patent: 4705940 (1987-11-01), Kohno
patent: 4731855 (1988-03-01), Suda et al.
patent: 4795911 (1989-01-01), Kohno et al.
patent: 4831274 (1989-05-01), Kohno et al.
patent: 4871257 (1989-10-01), Suzuki et al.
patent: 4886975 (1989-12-01), Murakami et al.
patent: 4955062 (1990-09-01), Terui
patent: 4965842 (1990-10-01), Crossley
patent: 4999511 (1991-03-01), Kohno
patent: 5017798 (1991-05-01), Murakami et al.
patent: 5046109 (1991-09-01), Fujimori et al.
patent: 5105092 (1992-04-01), Natsubori et al.
patent: 5249016 (1993-09-01), Tanaka
patent: 5404410 (1995-04-01), Tojo et al.
patent: 5572598 (1996-11-01), Wihl et al.
Kohno Michio
Tanaka Hiroshi
Canon Kabushiki Kaisha
Mancuso Joseph
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