Optical displacement detection apparatus employing diffraction g

Radiant energy – Photocells; circuits and apparatus – Optical or pre-photocell system

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25023116, H01J 314

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active

055346936

ABSTRACT:
In an optical displacement sensor for measuring a moving state of a moving object by projecting a light beam onto a diffraction grating provided on a surface of a scale connected to the moving object and utilizing diffracted light beams of specific orders from among diffracted light beams diffracted by the diffraction grating, a portion of the light beams incident upon the diffraction grating is reflected at a reflecting region provided on the back of the scale a plurality of times. A photosensor detects a change in the amount of light emanating from a transparent or a light-blocking reference position, formed on a region on the surface of the scale other than the region where the diffraction grating is formed. An output signal from the photosensor is utilized as a reference signal, which provides information relating to the moving state of the moving object.

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