Semiconductor manufacturing apparatus

Details Semiconductor manufacturing apparatus Semiconductor manufacturing apparatus

1990-12-14

1992-06-30

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

25044211, H01J 3730

Patent

active

051265710

ABSTRACT:
A semiconductor manufacturing apparatus for manufacturing a semiconductor device by treating a semiconductor wafer, comprising a vacuum implanting room, a wafer holder for installing the semiconductor wafer in the implanting room, nozzles provided in the wafer holder for evaporating a liquid refrigerant, and a compressor for supplying the liquid refrigerant to the nozzles through wall of the implanting room. As the refrigerant is compressed into the nozzles in a liquid state and evaporated in the vacuum implanting room, the semiconductor manufacturing apparatus is neither frozen nor frosted by the moisture in the ambient air.

REFERENCES:
patent: 4453080 (1984-06-01), Berkowitz
patent: 4458746 (1984-07-01), Holden
patent: 4537244 (1985-08-01), Holden
patent: 4599516 (1986-07-01), Taya et al.
patent: 4806769 (1989-02-01), Mori et al.

Affiliated with

Also associated with

Rating

Semiconductor manufacturing apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Semiconductor manufacturing apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Semiconductor manufacturing apparatus will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1865587