Techniques for forming electrically blowable fuses on an integra

Details Techniques for forming electrically blowable fuses on an integra Techniques for forming electrically blowable fuses on an integra

1997-09-19

1999-05-04

Tsai, Jey

Semiconductor device manufacturing: process

Coating with electrically or thermally conductive material

To form ohmic contact to semiconductive material

438467, H01L 2900

Patent

active

058997369

ABSTRACT:
A method for fabricating an electrically blowable fuse on a semiconductor substrate. The method includes forming a fuse portion 102 on the semiconductor substrate. The fuse portion is configured to turn substantially non-conductive when a current exceeding a predefined current level passes through the fuse portion. The method also includes depositing a substantially conformal first layer 302 of dielectric material above the fuse portion and depositing a second layer 304 of dielectric material above the first layer, thereby forming a protrusion of dielectric material above the fuse portion. The second layer being different from the first layer. The method further includes performing chemical-mechanical polish on the protrusion to form an opening through the second layer above the protrusion. There is also included etching, in a substantially isotropic manner, a portion of the first layer through the opening to form a microcavity 502 about the fuse portion. The etching is substantially selective to the second layer and the fuse portion. Additionally, there is included depositing a substantially conformal third layer 606 of dielectric material above the second layer, thereby closing the opening in the second layer.

REFERENCES:
patent: 5675174 (1997-10-01), Nakajima et al.
patent: 5729042 (1998-03-01), Lou et al.

Affiliated with

Also associated with

Rating

Techniques for forming electrically blowable fuses on an integra does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Techniques for forming electrically blowable fuses on an integra, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Techniques for forming electrically blowable fuses on an integra will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1865525