Optics: measuring and testing – By polarized light examination – Of surface reflection
Patent
1996-11-27
1998-05-19
Pham, Hoa Q.
Optics: measuring and testing
By polarized light examination
Of surface reflection
356382, G01J 400, G01B 1106
Patent
active
057542961
ABSTRACT:
The ellipsometric microscope (10) broadly includes a light source (14) for emitting a beam of monocromatic, collimated light, an adjustable support assembly (12) for directing the light beam along an incident path (56) for impingement on a film sample (58) at a predetermined angle for reflectance off of the sample along a reflectance path (60), and a detector (34) for detecting the reflectance beam. A polarizer (20) is positioned along the incident path (56) for elliptically polarizing the incident beam, and a remotely controllable variable retarder (22) is also positioned along the incident path (56) for altering the elliptical polarization of the incident beam. A beam expander (30) is positioned along the reflectance path (60) between the film sample (58) and the detector (34) for expanding the beam of light, and permitting only passage of parallel components of the reflectance beam. An analyzer (36) is coupled with the detector (34) for analyzing the reflectance beam for determining the thickness of the film sample (58).
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Kansas State University Research Foundation
Pham Hoa Q.
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