Method of manufacturing CoCrTa/CoCrTaPt bi-layer magnetic thin f

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering

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20419215, 427129, 427131, C23C 1434

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active

057728577

ABSTRACT:
Double layer, or bi-layer, magnetic films are deposited over a substrate with an underlayer. The bi-layer film is a film of two different magnetic layers which have different chemical composition, deposited with no spacer layer between the two layers. The lower magnetic layer should be of a low noise magnetic material, while the upper magnetic layer should be a high coercivity magnetic material. The bi-layer film exhibits a single response to magnetic recording and a joint coercivity different from the coercivity of either layer by itself. A preferred double layer media uses a CoCrTa layer deposited under a CoCrTaPt layer, with the CoCrTa layer comprising 30 to 70% of the total film thickness. The double layer film produces magnetic media with higher coercivity and lower media noise as compared to single layered films of either of the materials of the magnetic layers.

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CoCrPt Media on HCP Intermediate Layers, Fang et al., Data Storage Systems Center Review Presentations, Nov. 1, 1994.
A Study of Magnetic Recording Media on Glass Substrates, Shalin Duan et al., IEEE Transactions on Magnetics, vol. 30, No. 6, Nov. 1994.
NiAl Underlayers for CoCrTa Magnetic Thin Films, Li-Lien Lee et al., IEEE Transactions on Magnetics, vol. 30, No. 6, Nov. 1994.
High Coervicity and Low Noise Media Using Glass Substrate, Xiaoxia Tang et al., IEEE Transactions on Magnetics, vol. 30, No. 6, Nov. 1994.

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