Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
Patent
1996-12-26
1998-05-19
Oda, Christine K.
Measuring and testing
Speed, velocity, or acceleration
Angular rate using gyroscopic or coriolis effect
7350402, G01P 900
Patent
active
057538174
ABSTRACT:
A microgyroscope includes a substrate, a first sensor where a plurality of stripe-shaped anodes and cathodes are alternatively arrayed in parallel on the substrate, a driver arranged to be perpendicular to a stripe length direction of the first sensor on the substrate and where a plurality of stripe-shaped anodes and cathodes are alternatively arrayed in parallel, a vibratory structure having a plurality of first grooves of a stripe shape vertically spaced from a plane of the first sensor and the driver at a predetermined height and formed in a direction congruous with a stripe length direction of first sensor and a plurality of second grooves of a stripe shape formed in a direction congruous with a stripe length direction of the driver, a support portion formed on the substrate for maintaining the vibratory structure from the substrate at a predetermined height, and elastic members for elastically connecting the vibratory structure and the support portion.
REFERENCES:
patent: 5226321 (1993-07-01), Varnham
patent: 5392650 (1995-02-01), O'Brien
Cho Young-ho
Lee Chong-won
Park Kyu-yeon
Song Ci-moo
Korea Advanced Institute of Science and Technology
Oda Christine K.
Samsung Electronics Co,. Ltd.
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