Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
Patent
1995-06-07
1998-05-19
Duda, Kathleen
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Making electrical device
430396, 2504921, G03F 700
Patent
active
057534160
ABSTRACT:
Herein disclosed is an exposure technology for a semiconductor integrated circuit device which has a pattern as fine as that of an exposure wavelength. The technology contemplates to improve the resolution characteristics of the pattern by making use of the mutual interference of exposure luminous fluxes.
REFERENCES:
patent: 4153457 (1979-05-01), Kellie
patent: 5266446 (1993-11-01), Chang et al.
Moriuchi Noboru
Okamoto Yoshihiko
Duda Kathleen
Hitachi , Ltd.
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