Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Patent
1998-02-26
2000-05-23
Tran, Minh Loan
Active solid-state devices (e.g., transistors, solid-state diode
Field effect device
Having insulated electrode
257408, 257356, H01L 2362, H01L 2976, H01L 31119
Patent
active
060668806
ABSTRACT:
Performance for a gate insulation film of an insulated gate transistor is enhanced. A depletion layer is generated in a region of a gate electrode 12 which is provided in contact with a gate insulation film 4 in an OFF state, and the depletion layer disappears or a width thereof is reduced in an ON state.
REFERENCES:
patent: 4990974 (1991-02-01), Vinal
patent: 5471081 (1995-11-01), Fishbein et al.
Narain D. Arora, et al., "Modeling the Polysilicon Depletion Effect and Its Impact on Submicrometer CMOS Circuit Performance," IEEE Transactions On Electron Devices, vol. 42, No. 5, (May 1995), pp. 935-943.
B. Ricco, et al., "Characterization of Polysilicon-Gate Depletion in MOS Structures," IEEE Electron Device Letters, vol. 17, No. 3, (Mar. 1996), pp. 103-105.
Francis K. Chai, et al., "Effects of Scaling Thickness and Niobium Doping Level on Ferroelectric Thin Film Capacitor Memory Operation," IEEE International Electron Device Meeting 1995, pp. 123-125.
Mitsubishi Denki & Kabushiki Kaisha
Nguyen Cuong Quang
Tran Minh Loan
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