Coating apparatus – Gas or vapor deposition – Running length work
Patent
1996-03-22
1997-11-04
Breneman, R. Bruce
Coating apparatus
Gas or vapor deposition
Running length work
118715, C23C 1600
Patent
active
056835167
ABSTRACT:
A single body injector for delivering gases to a surface. The injector includes a single elongated block with one or more passages formed in the block and communicating with a gas delivery surface via thin channels which extend between the passages and the gas delivery surface. Metering tubes may be placed in the passages to control the profile of the gases delivered.
REFERENCES:
patent: 4123244 (1978-10-01), Leclereq
patent: 4131659 (1978-12-01), Authier
patent: 4136828 (1979-01-01), Anderson
patent: 4293326 (1981-10-01), Terneu
patent: 4446815 (1984-05-01), Kalbskopf
patent: 4499853 (1985-02-01), Miller
patent: 4537795 (1985-08-01), Nath
patent: 4834020 (1989-05-01), Bartholomew
patent: 4986216 (1991-01-01), Ohmori
patent: 5136975 (1992-08-01), Bartholomew et al.
patent: 5221556 (1993-06-01), Hawkins et al.
patent: 5232508 (1993-08-01), Arena
patent: 5328722 (1994-07-01), Ghanayem
patent: 5336326 (1994-08-01), Karner
patent: 5391232 (1995-02-01), Kanai
patent: 5411590 (1995-05-01), Hawkins
patent: 5487784 (1996-01-01), Ellis
Webster's New Riverside University Dictionary, The Riverside Publishing Company, 1994 p. 859.
DeDontney Jay B.
Gralenski Nicholas M.
Miller Adam Q.
Breneman R. Bruce
Lund Jeffrie R.
Watkins-Johnson Co.
LandOfFree
Single body injector and method for delivering gases to a surfac does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Single body injector and method for delivering gases to a surfac, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Single body injector and method for delivering gases to a surfac will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1829724